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EBL System

Etcher

Deposition

Photolithography

CVD

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Machine reservation

Charging scheme

 

Contact

Contact Information

Mailing Address:

Laboratory Location:

Room 404, HSH Engineering Building

Department of Electronic Engineering
The Chinese University of Hong Kong
Shatin, Hong Kong.

Phone: +852-3943 4307

Fax: +852 2603 5558

Room G03

William M W Mong Engineering Building
The Chinese University of Hong Kong
Shatin, Hong Kong.

Phone: +852-3943 4307

 

Contact Person:

 

Prof. Hon TSANG

hktsang@ee.cuhk.edu.hk

Mr. MT Yeung

mtyeung@ee.cuhk.edu.hk

Mr. Angus Lam

wlam@ee.cuhk.edu.hk